The effect of obtaining conditions on the structure and composition of Cu-MoS2 coatings upon magnetron sputtering of composite targets

The surface morphology and phase composition of the coatings obtained by magnetron sputtering Cu-MoS2 composite targets have been studied X-ray diffraction, scanning electron microscopy spectral microanalysis. diffraction studies show presence two crystalline phases, namely Cu with face-centered cubic lattice CuMo6S8 a rhombohedral lattice. Studies in Cu-CuMo6S8 revealed types structures. One structures is realized form globular formations, while second similar to structure that had single-component coating. microanalysis showed formations higher Mo S contents comparison other type structure. ratio between these elements close CuMo6S8. However, content many times than calculated amount for this compound. This suggests are heterostructural where only one phases Other possible should be based on copper. total area coating increases an increase proportion MoS2 sputtered target strongly depends substrate potential.